Dr. Shiyuan Liu is a professor of mechanical engineering and a professor of optical engineering at Huazhong University of Science and Technology (HUST). He is director of the Precision Instrument Research Center (PICR), and director of the Research Center for Integrated Circuit Measurement Equipment (ICME) at HUST. He is a recipient of the Nationa...

Zirong Tang, Professor & Doctoral Supervisor, School of Mechanical Science and Engineering, Huazhong University of Science and Technology.Prof. Tang's research focuses on micro-/nano-fabrication and nanometrology. He has accumulated extensive experience and established a solid research foundation in advanced electronic materials, micro-/nano-manuf...

Hao Jiang is currently a professor of Mechanical Science and Engineering School at Huazhong University of Science and Technology (HUST). He received his Ph.D. degree in 2011 at Florida Instituteof Technology. After receiving his ultimate degree, he worked as a postdoctoral research fellow and adjunct instructor at the University of Texas at Arling...

Qi Xia, professor and doctoral supervisor at the School of Mechanical Science and Technology, Huazhong University of Science and Technology. Mainly engaged in structural topology optimization, computational lithography and other aspects of research. In recent years, he has won the first prize in natural science from the Ministry of Education (ran...

Xiuguo Chen is currently a full professor at the School of Mechanical Science and Engineering, Huazhong University of Science and Technology. He has been recognized as a JSPS research fellow (2016-2018). His research primarily focuses on optical nanoscale measurement technologies and instrumentation, in-line measurement technologies and equipment ...

Honggang Gu is currently a Full Professor in School of Mechanical Science and Engineering, Huazhong University of Science & Technology (HUST). He focuses on the research field of micro/nano optical measurement technology and instrumentation. His research interests include advanced ellipsometry, computational imaging, optical metrology and inspect...

Jian Wang, Dr., Prof., High-level Talent of Hubei Province, National-level Young Talent for Metrology, received his BEng and PhD degrees, respectively, from the University of Science and Technology of China (USTC) in 2008 and the University of Huddersfield, UK, in 2013. After that, he conducted postdoctoral research at the National Physical Labor...

Wenyong Yu, Associate Professor and Ph.D. Supervisor at the School of Mechanical Engineering, Huazhong University of Science and Technology; He is a IEEE Senior Member, Senior Member of the Chinese Society of Mechanical Engineering, and Committee Member of the Assembly and Intelligent Integration Technology Branch of the Chinese Society of Mechani...

Jiamin Liu,assistant professor at the School of Mechanical Science and Technology, Huazhong University of Science and Technology. Mainly engaged in ellipsometric application, IC lithography defect inspection, computationallithography,and other aspects of related research. In recent years, he has won the first prize in technological inventionfrom ...