Dr. Shiyuan Liu is a professor of mechanical engineering and a professor of optical engineering at Huazhong University of Science and Technology (HUST). He is director of the Precision Instrument Research Center (PICR), and director of the Research Center for Integrated Circuit Measurement Equipment (ICME) at HUST. He is a recipient of the National Natural Science Foundation for Distinguished Young Scholars, and a leading talent in National Scientific and Technological Innovations. He was elected a fellow of the Institute of Physics (IOP), a fellow of the Chinese Society of Micro and Nano Technology (CSMNT), a board member of the International Committee of Measurement and Instrumentation (ICMI), and the chairman of the Integrated Circuit Measurement and Instrumentation Branch of the Chinese Society of Instrumentation. His main research interests are computational imaging and computational lithography, nanoscale and optical measurement technology and instrumentation, and inline measurement and inspection technology and equipment for semiconductor manufacturing. He has been granted over more than 20 projects by different funding agencies such as the National Natural Science Foundation of China and the Ministry of Science and Technology of China. He has published more than 300 peer-reviewed journal papers, and holds more than 200 authorized patents.