Function Introduction:

This Small Angle X-ray Scattering (SAXS) system, equipped with a high-brightness liquid metal jet X-ray source, a high-collimation multilayer mirror, and a readout-noise-free X-ray detector, meets the demands for nanostructure measurement, feature size characterization of nanomaterials, and in-situ measurement in nanofabrication .

Its applications include:

· Characterizing the periodicity and cross-sectional parameters of nanostructures in nanofabrication processes.

· Analyzing organic macromolecule solutions, nanoparticle powders, and solutions to extract particle size distribution information.

· Conducting X-ray diffraction analysis on nanomaterials for phase identification and lattice constant measurement .

Main Technical Parameters:

1. X-ray energy: 24 keV; X-ray flux: ≥ 4.5×10⁷ phs/s.

2. Beam size (FWHM): ≈ 1.1 mm × 1.1 mm; Beam divergence: ≤ 0.35 mrad; X-ray monochromaticity: > 99%.

3. Scatter-free slit collimation system; Slit movement precision: 10 μm.

4. Scattering vector (q) measurement range: 0.03 - 42.5 nm⁻¹; Scattering vector measurement accuracy: better than 0.004 nm⁻¹.

5. Detector with no readout noise; Point spread function: < 1 pixel.

6. 7-degree-of-freedom sample stage; Linear movement precision: 0.2 μm; Rotary stage precision: 0.001°.