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Xiuguo Chen

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Xiuguo Chen is currently a full professor at the School of Mechanical Science and Engineering, Huazhong University of Science and Technology. He has been recognized as a JSPS research fellow (2016-2018). His research primarily focuses on optical nanoscale measurement technologies and instrumentation, in-line measurement technologies and equipment for integrated circuit manufacturing, advanced instrument development, and characterization and measurement of novel optoelectronic and energy materials. He has been granted more than 40 domestic and international invention patents and has published over 100 SCI-indexed papers.

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  • B316, Advanced Manufacturing Building

    School of Mechanical Science and Engineering

    Huazhong University of Science and Technology

    1037 Luoyu Road, Wuhan, Hubei 430074, China

  • Tel: 027 8755 9543
  • Email: pirc@hust.edu.cn

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